[Download] "Ferroelectric Dielectrics Integrated on Silicon" by Emmanuel Defaÿ # Book PDF Kindle ePub Free

May 04, 2021

eBook details

Title: Ferroelectric Dielectrics Integrated on Silicon
Author : Emmanuel Defaÿ
Release Date : January 07, 2013
Genre: Electrical Engineering,Books,Professional & Technical,Engineering,
Pages : * pages
Size : 12793 KB

Description

This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films.